Invention Grant
- Patent Title: Integration of memory devices with different voltages
- Patent Title (中): 存储器件与不同电压的集成
-
Application No.: US14664940Application Date: 2015-03-23
-
Publication No.: US09406687B1Publication Date: 2016-08-02
- Inventor: Jianbo Yang , Yi Tat Lim , Sung Mun Jung
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/788 ; H01L29/66 ; H01L29/423 ; H01L21/28

Abstract:
Device and method for forming a device are presented. The method includes providing a substrate prepared with at least a memory cell region having first and second sub-regions and a logic region having input/output (I/O) region and core region. First voltage memory cell is formed in the first sub-region and second voltage memory cell is formed in the second sub-region of the memory cell region of the same substrate. The first voltage memory cell operates in a first voltage and the second voltage memory cell operates in a second voltage which is higher than the first voltage. Each of the first and second voltage memory cells includes a split gate having first and second gates. The first gate is a storage gate having a control gate over a floating gate and the second gate is a wordline. Logic I/O device is formed in the I/O region and logic core device is formed in the core region.
Information query
IPC分类: