Invention Grant
- Patent Title: Non-volatile memory device
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Application No.: US14863749Application Date: 2015-09-24
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Publication No.: US09406691B2Publication Date: 2016-08-02
- Inventor: Masaaki Higuchi , Katsuyuki Sekine , Fumiki Aiso , Takuo Ohashi , Tatsuya Okamoto
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/74
- IPC: H01L29/74 ; H01L31/111 ; H01L27/115 ; H01L29/778 ; H01L21/02

Abstract:
According to one embodiment, a non-volatile memory device includes a plurality of electrodes, at least one semiconductor layer, conductive layers, and first and second insulating films. The electrodes are arranged side by side in a first direction. The semiconductor layer extends into the electrodes in the first direction. The conductive layers are provided between each electrode and the semiconductor layer and separated from each other in the first direction. The first insulating film contacts the conductive layers, and extends in the first direction along the semiconductor layer between the conductive layers and the semiconductor layer. The second insulating film is provided between the first insulating film and the semiconductor layer. The first insulating film includes a first portion located between the conductive layers and the second insulating film, and a second portion located between the interlayer insulating film and the second insulating film.
Public/Granted literature
- US20160013201A1 NON-VOLATILE MEMORY DEVICE Public/Granted day:2016-01-14
Information query
IPC分类: