Invention Grant
US09406692B2 Vertical-type non-volatile memory devices having dummy channel holes
有权
具有虚拟通道孔的垂直型非易失性存储器件
- Patent Title: Vertical-type non-volatile memory devices having dummy channel holes
- Patent Title (中): 具有虚拟通道孔的垂直型非易失性存储器件
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Application No.: US14588693Application Date: 2015-01-02
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Publication No.: US09406692B2Publication Date: 2016-08-02
- Inventor: Chang-hyun Lee
- Applicant: Chang-hyun Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Priority: KR10-2014-0000838 20140103
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
A vertical-type nonvolatile memory device is provided in which differences between the sizes of channel holes in which channel structures are formed are reduced. The vertical-type nonvolatile memory device includes a substrate having channel hole recess regions in a surface thereof. Channel structures vertically protrude from the surface of the substrate on ones of the channel hole recess regions, and memory cell stacks including insulating and conductive layers are alternately stacked along sidewalls of the channel structures. A common source line extends along the surface of the substrate on other ones of the channel hole recess regions in a word line recess region, which separates adjacent memory cell stacks. Related fabrication methods are also discussed.
Public/Granted literature
- US20150194435A1 VERTICAL-TYPE NON-VOLATILE MEMORY DEVICES HAVING DUMMY CHANNEL HOLES Public/Granted day:2015-07-09
Information query
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