Invention Grant
- Patent Title: Thin film transistor array panel
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Application No.: US14799995Application Date: 2015-07-15
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Publication No.: US09406704B1Publication Date: 2016-08-02
- Inventor: Yung Bin Chung , Chul-Hyun Baek , Eun Jeong Cho , Jung Yun Jo
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2015-0006322 20150113
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/12 ; H01L29/66 ; H01L29/786 ; H01L29/417 ; H01L21/02

Abstract:
A thin-film transistor array panel includes an insulation substrate, a gate line disposed on the insulation substrate, a gate insulating layer disposed on the gate line, a semiconductor layer disposed on the gate insulating layer, a data line disposed on the semiconductor layer and including a source electrode, a drain electrode disposed on the semiconductor layer and facing the source electrode, a first electrode disposed on the gate insulating layer, a first passivation layer disposed on the first electrode and including silicon nitride, a second passivation layer disposed on the first passivation and including silicon nitride, and a second electrode disposed on the passivation layer, in which a first ratio of nitrogen-hydrogen bonds to silicon-hydrogen bonds in the first passivation layer is different from a second ratio of nitrogen-hydrogen bonds to silicon-hydrogen bonds in the second passivation layer.
Public/Granted literature
- US09536908B2 Thin film transistor array panel Public/Granted day:2017-01-03
Information query
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