Invention Grant
- Patent Title: Silicon process compatible trench magnetic device
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Application No.: US14745703Application Date: 2015-06-22
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Publication No.: US09406740B2Publication Date: 2016-08-02
- Inventor: Naigang Wang , Bucknell C. Webb
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Louis Percello
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L49/02 ; H01L21/768 ; H01L23/522 ; H01L21/311 ; H01L21/3205

Abstract:
A mechanism is provided for integrating an inductor into a semiconductor. A circular or other closed loop trench is formed in a substrate with sidewalls connected by a bottom surface in the substrate. A first insulator layer is deposited on the sidewalls of the trench so as to coat the sidewalls and the bottom surface. A conductor layer is deposited on the sidewalls and the bottom surface of the trench so as to coat the first insulator layer in the trench such that the conductor layer is on top of the first insulator layer in the trench. A first magnetic layer is deposited on the sidewalls and bottom surface of the trench so as to coat the first insulator layer in the trench without filling the trench. The first magnetic layer deposited on the sidewalls forms an inner closed magnetic loop and an outer closed magnetic loop within the trench.
Public/Granted literature
- US20150287772A1 SILICON PROCESS COMPATIBLE TRENCH MAGNETIC DEVICE Public/Granted day:2015-10-08
Information query
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