Invention Grant
- Patent Title: Suspended ring-shaped nanowire structure
- Patent Title (中): 悬挂环形纳米线结构
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Application No.: US14505018Application Date: 2014-10-02
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Publication No.: US09406790B2Publication Date: 2016-08-02
- Inventor: Kangguo Cheng , James J. Demarest , Balasubramanian S. Haran
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully Scott Murphy and Presser
- Agent Frank Digiglio
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/775 ; B82Y10/00 ; H01L29/06 ; H01L21/308 ; H01L29/423 ; H01L29/786 ; B82Y40/00 ; H01L21/02 ; B82Y99/00

Abstract:
A mandrel having vertical planar surfaces is formed on a single crystalline semiconductor layer. An epitaxial semiconductor layer is formed on the single crystalline semiconductor layer by selective epitaxy. A first spacer is formed around an upper portion of the mandrel. The epitaxial semiconductor layer is vertically recessed employing the first spacers as an etch mask. A second spacer is formed on sidewalls of the first spacer and vertical portions of the epitaxial semiconductor layer. Horizontal bottom portions of the epitaxial semiconductor layer are etched from underneath the vertical portions of the epitaxial semiconductor layer to form a suspended ring-shaped semiconductor fin that is attached to the mandrel. A center portion of the mandrel is etched employing a patterned mask layer that covers two end portions of the mandrel. A suspended semiconductor fin is provided, which is suspended by a pair of support structures.
Public/Granted literature
- US20150053913A1 SUSPENDED NANOWIRE STRUCTURE Public/Granted day:2015-02-26
Information query
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