Invention Grant
- Patent Title: Amplifier, laser apparatus, and extreme ultraviolet light generation system
- Patent Title (中): 放大器，激光设备和极紫外光发生系统
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Application No.: US14455701Application Date: 2014-08-08
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Publication No.: US09407052B2Publication Date: 2016-08-02
- Inventor: Osamu Wakabayashi , Krzysztof Nowak
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi-ken
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi-ken
- Agency: Studebaker & Brackett PC
- Priority: JP2012-271082 20121212
- Main IPC: H01S3/223
- IPC: H01S3/223 ; H01S3/23 ; H01S3/00 ; H05G2/00
Abstract:
An amplifier may include a plurality of discharge tubes arranged in a designed path of a seed laser beam and an optical system arranged to steer the seed laser beam to travel along the designed path.
Public/Granted literature
- US20140341248A1 AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM Public/Granted day:2014-11-20
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