Invention Grant
- Patent Title: Mask
- Patent Title (中): 面具
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Application No.: US14546237Application Date: 2014-11-18
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Publication No.: US09409204B2Publication Date: 2016-08-09
- Inventor: Jian Guo
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg; Christopher Thomas
- Priority: CN201410216482 20140521
- Main IPC: B05C21/00
- IPC: B05C21/00 ; H01L21/308 ; G03F1/42 ; G03F1/70 ; G03F1/44

Abstract:
The present invention provides a mask, on which a preset pattern is provided. First test patterns for determining an amount of a position offset of the mask during its movement are provided on the mask at a first side of the preset pattern and a second side of the preset pattern opposite to the first side, respectively. When being moved in a direction from the first side to the second side by a standard distance, the mask can determine whether a position offset occurs to the mask during its movement, and determine an amount of the position offset if a position offset occurs. Thus, the position offset of the mask can be corrected, thereby obtaining an accurate predetermined pattern on a glass substrate.
Public/Granted literature
- US20150336129A1 MASK Public/Granted day:2015-11-26
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