Invention Grant
US09409207B2 Ultrasonic device, ultrasonic probe, electronic equipment, and ultrasonic imaging apparatus 有权
超声波设备,超声波探头,电子设备和超声波成像设备

Ultrasonic device, ultrasonic probe, electronic equipment, and ultrasonic imaging apparatus
Abstract:
Provided is an ultrasonic device including: an ultrasonic element array substrate having a plurality of ultrasonic elements that each include a piezoelectric body; an acoustic lens secured via an acoustic matching layer to a surface, formed with the ultrasonic elements, of the ultrasonic element array substrate; and a support member secured to a surface, opposite to the surface formed with the ultrasonic elements, of the ultrasonic element array substrate, wherein the support member is formed to have a larger area, in plan view in the thickness direction of the ultrasonic element array substrate, and a higher bending stiffness than the ultrasonic element array substrate, and the acoustic lens is formed to have a lower bending stiffness than the ultrasonic element array substrate. The above-described ultrasonic device further includes an acoustic matching layer filled between the ultrasonic element array substrate and the acoustic lens.
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