Invention Grant
- Patent Title: MEMS device and method of making a MEMS device
- Patent Title (中): MEMS器件和制造MEMS器件的方法
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Application No.: US13439729Application Date: 2012-04-04
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Publication No.: US09409763B2Publication Date: 2016-08-09
- Inventor: Alfons Dehe , Martin Wurzer , Christian Herzum
- Applicant: Alfons Dehe , Martin Wurzer , Christian Herzum
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B3/00 ; H04R19/00 ; H04R7/06
Abstract:
A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.
Public/Granted literature
- US09284184B2 MEMS device and method of making a MEMS device Public/Granted day:2016-03-15
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