Invention Grant
US09409824B2 Ceramic material and sputtering target member 有权
陶瓷材料和溅射靶材

Ceramic material and sputtering target member
Abstract:
A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2θ=42.38° to 42.89° and further preferably at 2θ=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.
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