Invention Grant
- Patent Title: Ceramic material and sputtering target member
- Patent Title (中): 陶瓷材料和溅射靶材
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Application No.: US14692955Application Date: 2015-04-22
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Publication No.: US09409824B2Publication Date: 2016-08-09
- Inventor: Yosuke Sato , Yoshinori Isoda , Yuji Katsuda
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2012-245464 20121107
- Main IPC: C04B35/053
- IPC: C04B35/053 ; C04B35/04 ; H01L43/10 ; H01L43/12 ; G11B5/39 ; C23C14/08 ; C23C14/34 ; G01R33/09 ; C01G25/00 ; G01R33/00

Abstract:
A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2θ=42.38° to 42.89° and further preferably at 2θ=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.
Public/Granted literature
- US20150225298A1 CERAMIC MATERIAL AND SPUTTERING TARGET MEMBER Public/Granted day:2015-08-13
Information query
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