Invention Grant
- Patent Title: Aromatic polyacetals and articles comprising them
- Patent Title (中): 芳族聚缩醛和包含它们的物品
-
Application No.: US13943169Application Date: 2013-07-16
-
Publication No.: US09410016B2Publication Date: 2016-08-09
- Inventor: Matthias S. Ober , Duane R. Romer , John B. Etienne , Pulikkottil J. Thomas
- Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
- Applicant Address: US MI Midland
- Assignee: DOW GLOBAL TECHNOLOGIES LLC
- Current Assignee: DOW GLOBAL TECHNOLOGIES LLC
- Current Assignee Address: US MI Midland
- Agency: Cantor Colburn LLP
- Main IPC: C08G65/38
- IPC: C08G65/38 ; C08G65/40 ; C08G65/48 ; C07C43/23 ; C07C43/21
Abstract:
A polymer includes repeat units having the structure wherein R1, R2, Ar1, Ar2, and Ar3 are defined herein. The polymer can be prepared by Suzuki polycondensation. The acetal and/or ketal functionality in the polymer backbone make the backbone-cleavable in acid. The polymer is useful in applications including lithographic photoresists.
Public/Granted literature
- US20150025278A1 AROMATIC POLYACETALS AND ARTICLES COMPRISING THEM Public/Granted day:2015-01-22
Information query
