Invention Grant
- Patent Title: Chemical vapor deposition apparatus
- Patent Title (中): 化学气相沉积装置
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Application No.: US13655696Application Date: 2012-10-19
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Publication No.: US09410247B2Publication Date: 2016-08-09
- Inventor: Jong Hyun Lee , Hyun Seok Ryu , Jung Hyun Lee , Ki Sung Kim , Suk Ho Yoon , Young Sun Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2011-0107485 20111020
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; H01L21/02

Abstract:
A chemical vapor deposition apparatus can include a reaction chamber having a reaction space therein; a wafer boat disposed in the reaction space, the wafer boat arranged and structured to support a plurality of wafers; and a gas supplying part disposed in the reaction chamber to supply two or more reaction gases to the plurality of wafers. The gas supplying part can include a plurality of gas pipes disposed in the reaction chamber to supply the two or more reaction gases from outside to the reaction space; and a plurality of supplying pipes disposed around the wafer boat, wherein each of the supplying pipes is connected to two or more corresponding gas pipes, and wherein each supplying pipe is configured to supply the two or more reaction gases supplied by the two or more corresponding gas pipes to a corresponding one of the wafers.
Public/Granted literature
- US20130098293A1 CHEMICAL VAPOR DEPOSITION APPARATUS Public/Granted day:2013-04-25
Information query
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