Invention Grant
US09410641B2 Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve
有权
弯曲换能器，微型泵和微型阀，微型泵和微型阀的制造方法
- Patent Title: Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve
- Patent Title (中): 弯曲换能器，微型泵和微型阀，微型泵和微型阀的制造方法
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Application No.: US13604294Application Date: 2012-09-05
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Publication No.: US09410641B2Publication Date: 2016-08-09
- Inventor: Markus Herz , Martin Richter , Martin Wackerle
- Applicant: Markus Herz , Martin Richter , Martin Wackerle
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Perkins Coie LLP
- Agent Michael A. Glenn
- Main IPC: F04B45/04
- IPC: F04B45/04 ; F16K99/00 ; F04B43/04 ; H01L41/09
Abstract:
A method of manufacturing a bending transducer having a drive element and a membrane includes providing the membrane and the drive element and applying a production signal to the drive element during a bonding of the drive element to the membrane such that the drive element is pre-stressed after the bonding, wherein the production signal is of a same kind as an operation signal to operate the bending transducer.
Public/Granted literature
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