Invention Grant
US09410662B2 Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
有权
用于安装光学元件的装置,特别是在EUV投影曝光装置中
- Patent Title: Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
- Patent Title (中): 用于安装光学元件的装置,特别是在EUV投影曝光装置中
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Application No.: US13940790Application Date: 2013-07-12
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Publication No.: US09410662B2Publication Date: 2016-08-09
- Inventor: Bernhard Geuppert , Rodolfo Rabe , Ulrich Schoenhoff
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102011004299 20110217; DE102011082994 20110920
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12 ; G06K7/10 ; F16M13/02 ; G02B7/00 ; G03F7/20 ; G02B7/182

Abstract:
The invention relates to an arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus, comprising at least one actuator which exerts a controllable force on the optical element; wherein between the actuator and the optical element a mechanical coupling in the form of a pin is embodied in such a way that, relative to the drive axis of the actuator, the ratio of the stiffness of the mechanical coupling in an axial direction to the stiffness in a lateral direction is at least 100; and at least one damping element which brings about a damping of a natural vibration form of the pin in a lateral direction.
Public/Granted literature
- US20130314771A1 ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT, IN PARTICULAR IN AN EUV PROJECTION EXPOSURE APPARATUS Public/Granted day:2013-11-28
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