Invention Grant
US09410662B2 Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus 有权
用于安装光学元件的装置,特别是在EUV投影曝光装置中

Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
Abstract:
The invention relates to an arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus, comprising at least one actuator which exerts a controllable force on the optical element; wherein between the actuator and the optical element a mechanical coupling in the form of a pin is embodied in such a way that, relative to the drive axis of the actuator, the ratio of the stiffness of the mechanical coupling in an axial direction to the stiffness in a lateral direction is at least 100; and at least one damping element which brings about a damping of a natural vibration form of the pin in a lateral direction.
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