Invention Grant
- Patent Title: High capacity magnetic annealing system and method of operating
- Patent Title (中): 高容量磁退火系统及其操作方法
-
Application No.: US14752235Application Date: 2015-06-26
-
Publication No.: US09410742B2Publication Date: 2016-08-09
- Inventor: Ian Colgan , Ioan Domsa , George Eyres , Toru Ishii
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L27/22 ; F27B1/10 ; H01L21/673 ; H01L21/677 ; H01L21/687

Abstract:
An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.
Public/Granted literature
- US20160069613A1 HIGH CAPACITY MAGNETIC ANNEALING SYSTEM AND METHOD OF OPERATING Public/Granted day:2016-03-10
Information query
IPC分类: