Invention Grant
US09411145B2 Test sample device and test method for an optical microscope with subwavelength resolution 有权
测试样品器件和具有亚波长分辨率的光学显微镜的测试方法

Test sample device and test method for an optical microscope with subwavelength resolution
Abstract:
A test sample device for an optical microscope which images a sample in different light states with a local resolution in the subwavelength range of the visible spectral range, wherein the test sample device comprises: a test piece, which is designed to be microexamined with the microscope and has a surface on which nanostructures are arranged, wherein each nanostructure, viewed along the surface, has a dimension in the subwavelength range, wherein the nanostructures are spaced apart from one another by an amount which lies above the wavelength of the visible spectral range, and wherein the nanostructures are switchable collectively between a bright state, in which they illuminate, and a dark state, in which they do not illuminate, and a drive, which is designed to move the test piece in the subwavelength range, whereby the different light states can be realized by different movement states of the test piece.
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