Invention Grant
- Patent Title: Micro-electromechanical reflector and method for manufacturing a micro-electromechanical reflector
- Patent Title (中): 微机电反射器和微机电反射器的制造方法
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Application No.: US14311760Application Date: 2014-06-23
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Publication No.: US09411154B2Publication Date: 2016-08-09
- Inventor: Jochen Reinmuth
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Priority: DE102013211872 20130624
- Main IPC: G02B26/12
- IPC: G02B26/12 ; G02B26/08

Abstract:
A micro-electromechanical reflector is described including an electrode substrate having a first surface and a second surface, which is opposite to the first surface, on whose first surface a carrier layer is situated, a plurality of electrode recesses, which are introduced under the carrier layer from the first surface into the electrode substrate, a plurality of second electrode recesses, which are introduced from the second surface into the electrode substrate, at least one torsion spring structure which is formed in the carrier layer over one of the first electrode recesses, a carrier substrate, which is attached to the second surface of the electrode substrate, and a reflector surface, which is situated on the carrier layer.
Public/Granted literature
- US20140376069A1 MICRO-ELECTROMECHANICAL REFLECTOR AND METHOD FOR MANUFACTURING A MICRO-ELECTROMECHANICAL REFLECTOR Public/Granted day:2014-12-25
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