Invention Grant
US09411176B2 Oxide capacitor electro-optical phase shifter 有权
氧化物电容器电光移相器

Oxide capacitor electro-optical phase shifter
Abstract:
An electro-optical phase shifter to be located in an optical waveguide may include a rib of a semiconductor material extending along a length of the optical waveguide and a control structure configured to modify a concentration of carriers in the rib according to a control voltage present between first and second control terminals of the phase shifter. The control structure may include a conductive layer covering a portion of the rib and electrically connected to a first of the control terminals. An insulating layer may be configured to electrically isolate the conductive layer from the rib.
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