Invention Grant
- Patent Title: Display device
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Application No.: US14740599Application Date: 2015-06-16
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Publication No.: US09411208B2Publication Date: 2016-08-09
- Inventor: Shunpei Yamazaki
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2009-276454 20091204
- Main IPC: H01L29/12
- IPC: H01L29/12 ; H01L27/12 ; G02F1/1368 ; H01L29/786 ; G02F1/1337

Abstract:
One object is to provide a transistor including an oxide semiconductor film which is used for the pixel portion of a display device and has high reliability. A display device has a first gate electrode; a first gate insulating film over the first gate electrode; an oxide semiconductor film over the first gate insulating film; a source electrode and a drain electrode over the oxide semiconductor film; a second gate insulating film over the source electrode, the drain electrode and the oxide semiconductor film; a second gate electrode over the second gate insulating film; an organic resin film having flatness over the second gate insulating film; a pixel electrode over the organic resin film having flatness, wherein the concentration of hydrogen atoms contained in the oxide semiconductor film and measured by secondary ion mass spectrometry is less than 1×1016 cm−3.
Public/Granted literature
- US20150309347A1 Display Device Public/Granted day:2015-10-29
Information query
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