Invention Grant
- Patent Title: Methods and apparatus for controlling substrate uniformity
- Patent Title (中): 控制基板均匀性的方法和装置
-
Application No.: US13766238Application Date: 2013-02-13
-
Publication No.: US09412579B2Publication Date: 2016-08-09
- Inventor: S. M. Reza Sadjadi , Dmitry Lubomirsky , Hamid Noorbakhsh , John Zheng Ye , David H. Quach , Sean S. Kang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/02 ; H01L21/3065 ; H01L21/67 ; H01L21/683 ; H01L21/687

Abstract:
A dynamically tunable process kit, a processing chamber having a dynamically tunable process kit, and a method for processing a substrate using a dynamically tunable process kit are provided. The dynamically tunable process kit allows one or both of the electrical and thermal state of the process kit to be changed without changing the physical construction of the process kit, thereby allowing plasma properties, and hence processing results, to be easily changed without replacing the process kit. The processing chamber having a dynamically tunable process kit includes a chamber body that includes a portion of a conductive side wall configured to be electrically controlled, and a process kit. The processing chamber includes a first control system operable to control one or both of an electrical and thermal state of the process kit and a second control system operable to control an electrical state of the portion of the side wall.
Public/Granted literature
- US20130288483A1 METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY Public/Granted day:2013-10-31
Information query