Invention Grant
- Patent Title: Flash memory semiconductor device and method thereof
- Patent Title (中): 闪存半导体器件及其方法
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Application No.: US14098009Application Date: 2013-12-05
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Publication No.: US09412597B2Publication Date: 2016-08-09
- Inventor: Jen-Yuan Chang , Chia-Ping Lai
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/28 ; H01L27/115 ; H01L29/66 ; H01L29/792

Abstract:
The present disclosure provides a method of fabricating a flash memory semiconductor device. In one embodiment, a method of fabricating a resistive memory array includes providing a semiconductor substrate having at least one memory cell array region and at least one shunt region, forming a control gate electrode on the memory cell array region and the shunt region, depositing a dielectric film lamination and a conductive film to cover the control gate electrode and the semiconductor substrate, forming two recesses respectively corresponding to two sides of the control gate electrode on the shunt region, patterning the conductive film to form two sidewall memory gate electrodes and one top memory gate electrode, removing one of the sidewall memory gate electrodes on the memory cell array region, and removing the dielectric film lamination which is exposed from the memory gate electrodes.
Public/Granted literature
- US20150162412A1 FLASH MEMORY SEMICONDUCTOR DEVICE AND METHOD THEREOF Public/Granted day:2015-06-11
Information query
IPC分类: