Invention Grant
- Patent Title: End effector pads
- Patent Title (中): 末端执行器垫
-
Application No.: US14291982Application Date: 2014-05-30
-
Publication No.: US09412638B2Publication Date: 2016-08-09
- Inventor: Paul E. Pergande , Charles T. Carlson , Krag R. Senior
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Current Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Current Assignee Address: US MA Gloucester
- Main IPC: B66F19/00
- IPC: B66F19/00 ; H01L21/687 ; H01L21/677
Abstract:
An end effector pad including a fence member, a first recessed support member extending from a first side of the fence member, a second recessed support member extending from a second side of the fence member opposite the first side, a first glass plate having a relatively low coefficient of friction disposed on top of the first recessed support member for supporting a substrate thereon, and a second glass plate having a relatively low coefficient of friction disposed on top of the second recessed support member for supporting a substrate thereon.
Public/Granted literature
- US20150279720A1 END EFFECTOR PADS Public/Granted day:2015-10-01
Information query
