Invention Grant
- Patent Title: Methods of forming V0 structures for semiconductor devices that includes recessing a contact structure
- Patent Title (中): 形成包括凹陷接触结构的半导体器件的V0结构的方法
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Application No.: US14732078Application Date: 2015-06-05
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Publication No.: US09412660B1Publication Date: 2016-08-09
- Inventor: Ruilong Xie , Xunyuan Zhang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L29/417 ; H01L21/8234

Abstract:
One illustrative method disclosed herein includes, among other things, forming a source/drain contact structure between two spaced-apart transistor gate structures, recessing the source/drain contact structure to define a source/drain contact etch cavity and depositing a conformal second layer of insulating material above a first layer of insulating material and in the source/drain contact etch cavity. The method also includes forming a third layer of insulating material above the conformal second layer of insulating material, forming an opening in the conformal second layer of insulating material and forming a V0 via that is conductively coupled to the exposed portion of the recessed source/drain contact structure.
Information query
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