Invention Grant
US09412660B1 Methods of forming V0 structures for semiconductor devices that includes recessing a contact structure 有权
形成包括凹陷接触结构的半导体器件的V0结构的方法

Methods of forming V0 structures for semiconductor devices that includes recessing a contact structure
Abstract:
One illustrative method disclosed herein includes, among other things, forming a source/drain contact structure between two spaced-apart transistor gate structures, recessing the source/drain contact structure to define a source/drain contact etch cavity and depositing a conformal second layer of insulating material above a first layer of insulating material and in the source/drain contact etch cavity. The method also includes forming a third layer of insulating material above the conformal second layer of insulating material, forming an opening in the conformal second layer of insulating material and forming a V0 via that is conductively coupled to the exposed portion of the recessed source/drain contact structure.
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