Invention Grant
- Patent Title: Interposer structure and manufacturing method thereof
- Patent Title (中): 内插器结构及其制造方法
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Application No.: US14468329Application Date: 2014-08-26
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Publication No.: US09412686B2Publication Date: 2016-08-09
- Inventor: Ming-Tse Lin , Kuei-Sheng Wu , Chien-Li Kuo
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H05K1/09
- IPC: H05K1/09 ; H01L23/498 ; H01L21/48 ; H01L21/311

Abstract:
The present disclosure relates to an interposer structure and a manufacturing method thereof. The interposer structure includes a first dielectric layer, a conductive pad, and a bump. The conductive pad is disposed in the first dielectric layer, wherein a top surface of the conductive pad is exposed from a first surface of the first dielectric layer, the conductive pad further includes a plurality of connection feet, and the connection feet protrude from a bottom surface of the conductive pad to a second surface of the first dielectric layer. The bump is disposed on the second surface of the first dielectric layer, and the bump directly contacts to the connection feet. Through the aforementioned interposer structure, it is sufficient to achieve the purpose of improving the electrical performance of the semiconductor device and avoiding the signal being loss through the TSV.
Public/Granted literature
- US20160064314A1 INTERPOSER STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-03-03
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