Invention Grant
US09412759B2 CMOS gate contact resistance reduction 有权
CMOS栅极接触电阻降低

CMOS gate contact resistance reduction
Abstract:
A gate contact with reduced contact resistance is provided by increasing contact area between the gate contact and a gate conductive portion of a gate structure. The gate contact forms a direct contact with a topmost surface and at least portions of outermost sidewalls of a portion of the gate conductive portion, thus increasing the contact area between the gate contact and the gate structure. The gate contact area of the present application can be further increased by completely surrounding a portion of the gate conductive portion of the gate structure with the gate contact.
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