Invention Grant
- Patent Title: Thin film transistor, manufacturing method of same, and display device
- Patent Title (中): 薄膜晶体管及其制造方法及显示装置
-
Application No.: US14171331Application Date: 2014-02-03
-
Publication No.: US09412765B2Publication Date: 2016-08-09
- Inventor: Tomomasa Ueda , Shintaro Nakano , Nobuyoshi Saito , Kentaro Miura , Yujiro Hara , Hajime Yamaguchi
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-045567 20110302
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L29/786 ; H01L33/08 ; H01L21/336

Abstract:
According to one embodiment, a thin film transistor includes: a substrate; a semiconductor layer; first and second insulating films; and gate, source and drain electrodes. The semiconductor layer is provided on the substrate. The semiconductor layer is made of an oxide having indium. The semiconductor layer has first and second regions and other region. The first insulating film covers a top face of the other region. The second insulating film covers at least a pair of side surfaces of the semiconductor layer. The second insulating film is formed under a condition different from that for the first insulating film. The gate electrode is provided on the first and second insulating films or below the semiconductor layer. The source and drain electrodes are provided on the first and second regions, respectively. The drain and source electrodes sandwich the pair of the side surfaces of the semiconductor layer.
Public/Granted literature
- US20140147948A1 THIN FILM TRANSISTOR, MANUFACTURING METHOD OF SAME, AND DISPLAY DEVICE Public/Granted day:2014-05-29
Information query
IPC分类: