Invention Grant
- Patent Title: Nitride semiconductor device and method for manufacturing same
- Patent Title (中): 氮化物半导体器件及其制造方法
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Application No.: US14593703Application Date: 2015-01-09
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Publication No.: US09412857B2Publication Date: 2016-08-09
- Inventor: Akira Yoshioka , Yasunobu Saito , Hidetoshi Fujimoto , Tetsuya Ohno , Wataru Saito , Toru Sugiyama
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Patterson & Sheridan, LLP
- Priority: JP2011-064254 20110323
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/778 ; H01L29/66 ; H01L29/06 ; H01L23/31 ; H01L29/20 ; H01L29/40 ; H01L29/417 ; H01L29/423

Abstract:
According to one embodiment, a nitride semiconductor device includes a first semiconductor layer, a second semiconductor layer, a first electrode, a second electrode, a third electrode, a first insulating film and a second insulating film. The first semiconductor layer includes a nitride semiconductor. The second semiconductor layer is provided on the first layer, includes a nitride semiconductor, and includes a hole. The first electrode is provided in the hole. The second electrode is provided on the second layer. The third electrode is provided on the second layer so that the first electrode is disposed between the third and second electrodes. The first insulating film is provided between the first electrode and an inner wall of the hole and between the first and second electrodes, and is provided spaced from the third electrode. The second insulating film is provided in contact with the second layer between the first and third electrodes.
Public/Granted literature
- US20150123141A1 NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2015-05-07
Information query
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