Invention Grant
- Patent Title: BEOL selectivity stress film
- Patent Title (中): BEOL选择性应力膜
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Application No.: US13924731Application Date: 2013-06-24
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Publication No.: US09412866B2Publication Date: 2016-08-09
- Inventor: Gwo-Chyuan Kuoh , Chen-Chung Lai , Kang-Min Kuo , Bor-Zen Tien , Yen-Ming Peng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8238 ; H01L23/00 ; H01L21/768

Abstract:
The present disclosure relates to an integrated chip having one or more back-end-of-the-line (BEOL) selectivity stress films that apply a stress that improves the performance of semiconductor devices underlying the BEOL selectivity stress films, and an associated method of formation. In some embodiments, the integrated chip has a semiconductor substrate with one or more semiconductor devices having a first device type. A stress transfer element is located within a back-end-of-the-line stack at a position over the one or more semiconductor devices. A selectivity stress film is located over the stress transfer element. The selectivity stress film induces a stress upon the stress transfer element, wherein the stress has a compressive or tensile state depending on the first device type of the one or more semiconductor devices. The stress acts upon the one or more semiconductor devices to improve their performance.
Public/Granted literature
- US20140374832A1 BEOL SELECTIVITY STRESS FILM Public/Granted day:2014-12-25
Information query
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