Invention Grant
US09412938B2 Memory device, semiconductor device, method for producing memory device, and method for producing semiconductor device 有权
存储装置,半导体装置,存储装置的制造方法以及半导体装置的制造方法

Memory device, semiconductor device, method for producing memory device, and method for producing semiconductor device
Abstract:
A semiconductor device includes a first pillar-shaped semiconductor layer and a gate insulating film around the first pillar-shaped semiconductor layer. A gate electrode is around the gate insulating film and a gate line is connected to the gate electrode. A first diffusion layer resides in an upper portion of the first pillar-shaped semiconductor layer and a second diffusion layer resides in a lower portion of the first pillar-shaped semiconductor layer. A memory device on the first diffusion layer includes a pillar-shaped phase-change layer and a reset gate insulating film surrounding the pillar-shaped phase-change layer. A reset gate surrounds the reset gate insulating film, where the reset gate functions as a heater, and the pillar-shaped phase-change layer and the reset gate are electrically insulated from each other.
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