Invention Grant
US09412938B2 Memory device, semiconductor device, method for producing memory device, and method for producing semiconductor device
有权
存储装置,半导体装置,存储装置的制造方法以及半导体装置的制造方法
- Patent Title: Memory device, semiconductor device, method for producing memory device, and method for producing semiconductor device
- Patent Title (中): 存储装置,半导体装置,存储装置的制造方法以及半导体装置的制造方法
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Application No.: US15019441Application Date: 2016-02-09
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Publication No.: US09412938B2Publication Date: 2016-08-09
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Peninsula Plaza
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L31/113 ; H01L29/06 ; H01L21/00 ; H01L21/336 ; H01L45/00

Abstract:
A semiconductor device includes a first pillar-shaped semiconductor layer and a gate insulating film around the first pillar-shaped semiconductor layer. A gate electrode is around the gate insulating film and a gate line is connected to the gate electrode. A first diffusion layer resides in an upper portion of the first pillar-shaped semiconductor layer and a second diffusion layer resides in a lower portion of the first pillar-shaped semiconductor layer. A memory device on the first diffusion layer includes a pillar-shaped phase-change layer and a reset gate insulating film surrounding the pillar-shaped phase-change layer. A reset gate surrounds the reset gate insulating film, where the reset gate functions as a heater, and the pillar-shaped phase-change layer and the reset gate are electrically insulated from each other.
Public/Granted literature
Information query
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