Invention Grant
- Patent Title: Method of manufacturing organic light-emitting display apparatus
- Patent Title (中): 制造有机发光显示装置的方法
-
Application No.: US14078422Application Date: 2013-11-12
-
Publication No.: US09412961B2Publication Date: 2016-08-09
- Inventor: Cheol-Min Jang , Myung-Soo Huh , Suk-Won Jung , Jae-Hyun Kim , Sung-Chul Kim , Jin-Kwang Kim , Chang-Woo Shim , Sung-Hun Key , In-Kyo Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2012-0128370 20121113
- Main IPC: H01L51/50
- IPC: H01L51/50 ; H01L51/56 ; H01L51/00 ; C23C16/40 ; C23C16/455
Abstract:
A vapor deposition apparatus for depositing a thin film on a substrate, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a vapor deposition apparatus including: a stage onto which a substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member facing the substrate, to sequentially supply a plurality of gases towards the substrate, and a method of manufacturing an organic light-emitting display apparatus using the same.
Public/Granted literature
- US20140134768A1 VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS Public/Granted day:2014-05-15
Information query
IPC分类:
