Invention Grant
- Patent Title: Method and device for generating optical radiation by means of electrically operated pulsed discharges
- Patent Title (中): 通过电动脉冲放电产生光辐射的方法和装置
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Application No.: US14236936Application Date: 2012-06-12
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Publication No.: US09414476B2Publication Date: 2016-08-09
- Inventor: Ralf Pruemmer , Ralf Conrads , Klaus Bergmann , Felix Kuepper , Jeroen Jonkers
- Applicant: Ralf Pruemmer , Ralf Conrads , Klaus Bergmann , Felix Kuepper , Jeroen Jonkers
- Applicant Address: DE Munich JP Tokyo
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,USHIO DENKI KABUSHIKI KAISHA
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,USHIO DENKI KABUSHIKI KAISHA
- Current Assignee Address: DE Munich JP Tokyo
- Agency: Renner Kenner Greive Bobak Taylor & Weber
- Priority: EP11006474 20110805
- International Application: PCT/EP2012/002483 WO 20120612
- International Announcement: WO2013/020613 WO 20130214
- Main IPC: H05G1/46
- IPC: H05G1/46 ; H05G2/00

Abstract:
The present invention relates to a method and device for generating optical radiation (18), in particular EUV radiation or soft x-rays, by means of electrically operated discharges. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6), which is applied to one or several surface(s) moving in the discharge space and is at least partially evaporated by one or several pulsed energy beam(s) (9). At least two consecutive pulses (16) are applied within a time interval of each electrical discharge onto said surface(s). The delay between and/or the pulse energy of said consecutive pulses is controlled to stabilize the position of an emission center of the plasma (15).
Public/Granted literature
- US20140159581A1 METHOD AND DEVICE FOR GENERATING OPTICAL RADIATION BY MEANS OF ELECTRICALLY OPERATED PULSED DISCHARGES Public/Granted day:2014-06-12
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