Invention Grant
- Patent Title: Method of manufacturing ink jet printheads including electrostatic actuators
- Patent Title (中): 制造包括静电致动器的喷墨打印头的方法
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Application No.: US14561519Application Date: 2014-12-05
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Publication No.: US09421772B2Publication Date: 2016-08-23
- Inventor: Peter J. Nystrom , Gary D. Redding , Mark A. Cellura
- Applicant: Xerox Corporation
- Applicant Address: US CT Norwalk
- Assignee: XEROX CORPORATION
- Current Assignee: XEROX CORPORATION
- Current Assignee Address: US CT Norwalk
- Agency: MH2 TECHNOLOGY LAW GROUP LLP
- Main IPC: B41J2/16
- IPC: B41J2/16 ; B41J2/14 ; B81C1/00

Abstract:
A method for forming a plurality of electrostatic actuator membranes for an electrostatically actuated ink jet printhead. The method can include forming a blanket actuator membrane layer on an etch stop layer, where the etch stop layer is interposed between the blanket membrane layer and a handle layer such as a semiconductor wafer. The blanket actuator membrane layer is patterned to form a plurality of actuator membranes. The plurality of actuator membranes is attached to a printhead drive assembly that includes circuitry for actuating the plurality of actuator membranes. Subsequently, the handle layer and etch stop layer are removed, thereby leaving the plurality of actuator membranes attached to the printhead drive assembly.
Public/Granted literature
- US20160159091A1 WAFER LEVEL FABRICATION AND BONDING OF MEMBRANES FOR ELECTROSTATIC PRINTHEADS Public/Granted day:2016-06-09
Information query
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