Invention Grant
- Patent Title: Piezoelectric membrane, piezoelectric device, and inkjet head
- Patent Title (中): 压电膜,压电元件和喷墨头
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Application No.: US14810078Application Date: 2015-07-27
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Publication No.: US09427967B2Publication Date: 2016-08-30
- Inventor: Takaya Nagahata
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2014-153165 20140728; JP2014-179163 20140903; JP2014-179167 20140903; JP2015-139079 20150710
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/187 ; H01L41/047 ; H01L41/053 ; H01L41/08 ; H01L41/083 ; H01L41/09 ; H01L41/27 ; H01L41/318 ; H01L41/319 ; H01L41/33 ; B41J2/16

Abstract:
An inkjet head includes a substrate that defines a cavity in which ink is stored, a vibrating membrane that is supported by the substrate and that defines the cavity, and a piezoelectric device that is disposed on the vibrating membrane and that changes a volume of the cavity by displacing the vibrating membrane. The piezoelectric device includes a lower electrode, a piezoelectric membrane that is disposed on the lower electrode, and an upper electrode that is disposed on the piezoelectric membrane and that faces the lower electrode with the piezoelectric membrane interposed between the upper electrode and the lower electrode. The piezoelectric membrane includes a columnar structure layer and an amorphous structure layer of a piezoelectric material. The amorphous structure layer is stacked contiguously with the columnar structure layer.
Public/Granted literature
- US20160027988A1 PIEZOELECTRIC MEMBRANE, PIEZOELECTRIC DEVICE, AND INKJET HEAD Public/Granted day:2016-01-28
Information query
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