Invention Grant
US09431411B1 Efficient process for 3D NAND memory with socketed floating gate cells
有权
具有插座浮栅单元的3D NAND存储器的高效处理
- Patent Title: Efficient process for 3D NAND memory with socketed floating gate cells
- Patent Title (中): 具有插座浮栅单元的3D NAND存储器的高效处理
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Application No.: US14825408Application Date: 2015-08-13
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Publication No.: US09431411B1Publication Date: 2016-08-30
- Inventor: Raul Adrian Cernea
- Applicant: SanDisk Technologies, Inc.
- Applicant Address: US TX Plano
- Assignee: SanDisk Technologies LLC
- Current Assignee: SanDisk Technologies LLC
- Current Assignee Address: US TX Plano
- Agency: Davis Wright Tremaine LLP
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/115 ; H01L21/311 ; H01L21/3213 ; H01L21/768 ; H01L21/28 ; H01L23/532 ; H01L29/49

Abstract:
A 3D NAND memory has vertical NAND strings across multiple memory layers above a substrate, with each memory cell of a NAND string residing in a different memory layer. Word lines in each memory layer each has a series of socket components aligned to embed respective floating gates of a group memory cells. This structure allows reduction in cell dimension as well as reducing floating-gate perturbations between neighboring cells. The memory is fabricated by using odd and even subarrays of vertical shafts on a multi-layer slab to create at different times odd and even socket components that overlap to form continuous word lines with socket components. In particular, with only three masks, the even memory cells are fabricated to have their word line socket component enlarged to overlap with those of the odd memory cells in order to form continuous word lines in the row direction.
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