Invention Grant
- Patent Title: Array substrate and manufacturing method thereof
- Patent Title (中): 阵列基板及其制造方法
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Application No.: US12888144Application Date: 2010-09-22
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Publication No.: US09431436B2Publication Date: 2016-08-30
- Inventor: Weifeng Zhou , Jian Guo , Xing Ming
- Applicant: Weifeng Zhou , Jian Guo , Xing Ming
- Applicant Address: CN Beijing
- Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN200910093196 20090925
- Main IPC: H01L27/12
- IPC: H01L27/12 ; G02F1/1368 ; G02F1/1362

Abstract:
A method of manufacturing an array substrate is disclosed. A first conductive pattern, a first insulating layer, a second conductive pattern, and a second insulating layer on a base substrate is successively formed. The second insulating layer and the first insulating layer are patterned with a double-tone mask. At least a half lap joint via hole in the second insulating layer, and at least a full lap joint via hole in both the first insulating layer and the second insulating layer is formed. The second conductive pattern corresponds to a part of the half lap joint via hole, and the first conductive pattern corresponds to the whole of the full lap joint via hole. A third conductivity pattern is formed on the surface of the second conductivity pattern and the first insulating layer and a fourth conductive pattern is formed on the surface of the first conductive pattern.
Public/Granted literature
- US20110074663A1 ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-03-31
Information query
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