Invention Grant
US09431436B2 Array substrate and manufacturing method thereof 有权
阵列基板及其制造方法

Array substrate and manufacturing method thereof
Abstract:
A method of manufacturing an array substrate is disclosed. A first conductive pattern, a first insulating layer, a second conductive pattern, and a second insulating layer on a base substrate is successively formed. The second insulating layer and the first insulating layer are patterned with a double-tone mask. At least a half lap joint via hole in the second insulating layer, and at least a full lap joint via hole in both the first insulating layer and the second insulating layer is formed. The second conductive pattern corresponds to a part of the half lap joint via hole, and the first conductive pattern corresponds to the whole of the full lap joint via hole. A third conductivity pattern is formed on the surface of the second conductivity pattern and the first insulating layer and a fourth conductive pattern is formed on the surface of the first conductive pattern.
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