Invention Grant
US09431995B2 Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object 有权
谐振器元件,谐振器,谐振器装置,振荡器,电子装置和移动物体

Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object
Abstract:
A resonator element includes a quartz crystal substrate having a main surface along a plane including an X-axis and a Z′-axis, and a thickness in a Y′-axis direction. The quartz crystal substrate includes a vibrating portion including a side along the X-axis, a side along the Z′-axis, and a peripheral portion having a thickness smaller than that of the vibrating portion, which is provided along an outer edge of the vibrating portion. The vibrating portion includes a first portion and a second portion having a thickness smaller than that of the first portion, which is provided on at least an outer edge on a +X side of the X-axis and an outer edge on a −X side thereof, among outer edges of the first portion. When Z is a length of the quartz crystal substrate along the Z′-axis, and t is a thickness of the first portion, 11
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