Invention Grant
- Patent Title: Wafer handling traction control system
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Application No.: US14864713Application Date: 2015-09-24
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Publication No.: US09434071B2Publication Date: 2016-09-06
- Inventor: Matthew J. Rodnick
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: G06F7/00
- IPC: G06F7/00 ; G06F19/00 ; B25J9/16 ; H01L21/687 ; H01L21/67 ; H01L21/66 ; B25J13/08 ; B25J11/00

Abstract:
A wafer handling traction control system is provided that is able to detect slippage of a semiconductor wafer with respect to an end effector and is able to adjust the end effector's movement in order to minimize further slippage. Upon the detection of relative motion of the semiconductor wafer with respect to the end effector past a threshold amount, the end effector's movements are adjusted to minimize slippage of the semiconductor wafer. The wafer handling traction control system may include a sensor that detects relative motion between the semiconductor wafer and the end effector.
Public/Granted literature
- US20160023353A1 WAFER HANDLING TRACTION CONTROL SYSTEM Public/Granted day:2016-01-28
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