Invention Grant
US09434555B2 Part inspection apparatus and handler 有权
零件检查装置和处理器

Part inspection apparatus and handler
Abstract:
A handler includes a supply shuttle plate on which a device is placed and cooled, and a transfer robot configured to transfer the device placed on the supply shuttle plate from the supply shuttle plate. The transfer robot includes an adsorbing portion configured to adsorb the device placed on the supply shuttle plate thereon, a vertical movement arm configured to move the adsorbing portion away from the supply shuttle plate, an arm box configured to accommodate the adsorbing portion together with the device in a state of being kept away from the supply shuttle plate, and a dry air supply unit configured to supply dry gas into the arm box.
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