Invention Grant
- Patent Title: Part inspection apparatus and handler
- Patent Title (中): 零件检查装置和处理器
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Application No.: US13765114Application Date: 2013-02-12
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Publication No.: US09434555B2Publication Date: 2016-09-06
- Inventor: Masami Maeda , Toshioki Shimojima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-029764 20120214
- Main IPC: G01R31/28
- IPC: G01R31/28 ; B65G49/00 ; H01L21/67 ; H01L21/683

Abstract:
A handler includes a supply shuttle plate on which a device is placed and cooled, and a transfer robot configured to transfer the device placed on the supply shuttle plate from the supply shuttle plate. The transfer robot includes an adsorbing portion configured to adsorb the device placed on the supply shuttle plate thereon, a vertical movement arm configured to move the adsorbing portion away from the supply shuttle plate, an arm box configured to accommodate the adsorbing portion together with the device in a state of being kept away from the supply shuttle plate, and a dry air supply unit configured to supply dry gas into the arm box.
Public/Granted literature
- US20130209199A1 PART INSPECTION APPARATUS AND HANDLER Public/Granted day:2013-08-15
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