Invention Grant
- Patent Title: Branched siloxanes and methods for synthesis
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Application No.: US14681416Application Date: 2015-04-08
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Publication No.: US09434750B2Publication Date: 2016-09-06
- Inventor: C. Grant Willson , Tsuyoshi Ogawa , Michael B. Jacobsson
- Applicant: Board of Regents, The University of Texas System
- Applicant Address: US TX Austin
- Assignee: Board of Regents, The University of Texas System
- Current Assignee: Board of Regents, The University of Texas System
- Current Assignee Address: US TX Austin
- Agency: Medlen & Carroll, LLP
- Main IPC: C07F7/08
- IPC: C07F7/08 ; C07D303/12 ; C07D301/00
Abstract:
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
Public/Granted literature
- US20150274757A1 Branched Siloxanes And Methods For Synthesis Public/Granted day:2015-10-01
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