Invention Grant
- Patent Title: Method and regeneration apparatus for regenerating a plating composition
- Patent Title (中): 用于再生电镀组合物的方法和再生装置
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Application No.: US14985761Application Date: 2015-12-31
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Publication No.: US09435041B2Publication Date: 2016-09-06
- Inventor: Arnd Kilian , Christian Nöthlich , Dieter Metzger , Sebastian Kühne
- Applicant: Atotech Deutschland GmbH
- Applicant Address: DE Berlin
- Assignee: ATOTECH DEUTSCHLAND GMBH
- Current Assignee: ATOTECH DEUTSCHLAND GMBH
- Current Assignee Address: DE Berlin
- Agency: Harding, Earley, Follmer & Frailey, P.C.
- Agent Frank J. Bonini, Jr.; John F. A. Earley, III
- Priority: EP12170872 20120605
- Main IPC: C25B9/08
- IPC: C25B9/08 ; C23C18/54

Abstract:
A method and apparatus for regenerating a plating composition which is suitable for depositing at least one first metal on a substrate where the plating rate in the plating composition is very low, where the concentration of the at least one first metal in the plating composition cannot be easily set at a constant level, and where plating-out of the at least one first metal from the plating composition takes place. The method and apparatus for regenerating a plating composition is suitable for depositing at least one first metal on a substrate at a sufficiently high plating rate, while offering the opportunity to easily adjust the concentration of the at least one first metal in the plating composition at a constant level and to provide the plating composition with sufficient stability against decomposition thereof in order to safeguard the regeneration cell from plated-out first metal.
Public/Granted literature
- US20160153097A1 METHOD AND REGENERATION APPARATUS FOR REGENERATING A PLATING COMPOSITION Public/Granted day:2016-06-02
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