Invention Grant
- Patent Title: CMOS MOEMS sensor device
- Patent Title (中): CMOS MOEMS传感器设备
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Application No.: US13378234Application Date: 2010-06-15
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Publication No.: US09435822B2Publication Date: 2016-09-06
- Inventor: Lukas Willem Snyman
- Applicant: Lukas Willem Snyman
- Applicant Address: ZA Pretoria
- Assignee: Tshwane University of Technology
- Current Assignee: Tshwane University of Technology
- Current Assignee Address: ZA Pretoria
- Agency: Merchant & Gould P.C.
- Priority: ZA2009/04162 20090615; ZA2009/04163 20090615; ZA2009/04509 20090626; ZA2009/04665 20090703; ZA2009/04666 20090703; ZA2009/05249 20090728; ZA2009/08834 20091211; ZA2010/03603 20100521; ZA2010/03605 20100521
- International Application: PCT/ZA2010/000033 WO 20100615
- International Announcement: WO2011/038423 WO 20110331
- Main IPC: H01L27/15
- IPC: H01L27/15 ; G01P15/093 ; G01D5/26 ; G01F1/28 ; G01N21/77 ; G02B6/12 ; G02B6/42
Abstract:
The present invention relates to a sensor device. More particularly, the invention relates to a CMOS-based micro-optical-electromechanical-sensor (MOEMS) device with silicon light emitting devices, silicon waveguides and silicon detectors being fabricated using current Complementary Metal Oxide Semiconductor (CMOS) technology or Silicon on Insulator (SOI) technology. According to the invention there is provided a sensor comprising: a Silicon-based light emitting structure; an integrated electro-optical mechanical interface structure that is capable to sense mechanical deflections; an integrated electronic driving and processing circuitry so as to detect physical parameters such as vibration, motion, rotation, acceleration.
Public/Granted literature
- US20120154812A1 CMOS MOEMS SENSOR DEVICE Public/Granted day:2012-06-21
Information query
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