Invention Grant
US09435823B2 Physical quantity sensor, electronic device, and moving object 有权
物理量传感器,电子设备和移动物体

Physical quantity sensor, electronic device, and moving object
Abstract:
A physical quantity sensor includes: an element piece including a movable weight and movable electrode portions which are provided to extend from the movable weight; fixed electrode portions which are provided in a first direction in which the element piece is displaced, with a gap d1 interposed therebetween; and fixed portions which are provided to face an end portion of the element piece, in which a recess is provided on the end portion of the movable weight in a position facing the fixed portions, a first stopper portion which extends towards the movable weight is provided on the fixed portion, and a tip end of the first stopper portion is inserted into the recess, and a gap d2 between the tip end and the movable weight is narrower than the gap d1.
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