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US09435846B2 Testing of thru-silicon vias 有权
硅通孔测试

Testing of thru-silicon vias
Abstract:
A system and a method for testing thru silicon vias (TSVs) in a silicon die. A silicon die containing multiple TSVs is mounted on a wafer tape. Two probe points are probed on the exposed side of the silicon die. A resistance is measured between the two probe points and an electrical integrity is determined based on the measured resistance.
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