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US09435950B2 Semiconductor optical device 有权
半导体光学器件

Semiconductor optical device
Abstract:
A semiconductor optical device including: a substrate including a first region and a second region; a first optical waveguide disposed on the first region, the first optical waveguide including a core layer and a cladding layer disposed on the core layer, the cladding layer including a first cladding region and a semiconductor layer disposed on the first cladding region, the first optical waveguide extending from an end facet of the semiconductor optical device to a boundary between the first region and the second region; a second optical waveguide disposed on the second region; and a region disposed on the cladding layer, the region having a lower refractive index than that of the first cladding region. The semiconductor layer has a higher refractive index than that of the first cladding region. The thickness of the core layer monotonically increases from the end facet toward the boundary.
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