Invention Grant
US09436090B2 Exposure apparatus and a method for controlling radiation from a lamp for exposing a photosensitive element
有权
曝光装置和用于控制来自用于曝光感光元件的灯的辐射的方法
- Patent Title: Exposure apparatus and a method for controlling radiation from a lamp for exposing a photosensitive element
- Patent Title (中): 曝光装置和用于控制来自用于曝光感光元件的灯的辐射的方法
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Application No.: US14244293Application Date: 2014-04-03
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Publication No.: US09436090B2Publication Date: 2016-09-06
- Inventor: Helmut Luetke
- Applicant: E I DU PONT DE NEMOURS AND COMPANY
- Applicant Address: US DE Wilmington
- Assignee: E I DU PONT DE NEMOURS AND COMPANY
- Current Assignee: E I DU PONT DE NEMOURS AND COMPANY
- Current Assignee Address: US DE Wilmington
- Agent Simon L. Xu
- Main IPC: G03F7/20
- IPC: G03F7/20 ; B41C1/00

Abstract:
The invention pertains to an exposure apparatus, a method for controlling a photosensitive element to radiation using the exposure apparatus, and a method for exposing a photosensitive element to radiation. The exposure apparatus includes a base assembly having an exposure bed that supports the photosensitive element, and a lamp housing assembly having two or more lamps. The lamp housing assembly includes an adjustable ballast connected to at least one of the lamps to adjust power received by the one lamp, a sensor for measuring irradiance impinging the exposure bed; and a controller that adjusts the adjustable ballast based on comparison of the measured irradiance to the target irradiance, thereby adjusting the irradiance emitting from the lamp to the target irradiance.
Public/Granted literature
Information query
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