A method of testing a TAMH includes providing a slider body having a waveguide embedded therein with an incidence end extending toward a back surface of the slider body; providing a light source unit including a light source and a unit substrate; coating a bonding material layer on the back surface, under the bottom, or both on the back surface and under the bottom of the unit substrate; coating a localization material layer on the back surface; aligning the light source unit to the slider body; causing a light emitted from the light source and allowed to be incident on the incidence end to anneal the localization material layer to generate an annealing mark; removing the light source unit or the light source from the slider body; and measuring a position offset between the annealing mark and the incidence end. The method can evaluate alignment accuracy of a slider body and a light source unit in two dimensional directions.