Invention Grant
- Patent Title: Assembly for feeding in HF current for tubular cathodes
- Patent Title (中): 用于馈送管状阴极的HF电流的组件
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Application No.: US14357285Application Date: 2012-11-09
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Publication No.: US09437403B2Publication Date: 2016-09-06
- Inventor: Olaf Gawer , Sascha Kreher
- Applicant: FHR ANLAGENBAU GMBH
- Applicant Address: DE Ottendorf-Okrilla
- Assignee: FHR ANLAGENBAU GMBH
- Current Assignee: FHR ANLAGENBAU GMBH
- Current Assignee Address: DE Ottendorf-Okrilla
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102011086111 20111110
- International Application: PCT/EP2012/072235 WO 20121109
- International Announcement: WO2013/068524 WO 20130516
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C25B11/00 ; C25B13/00 ; H01J37/34

Abstract:
An arrangement is provided for feeding in HF current for rotatable tubular cathodes in a vacuum chamber of a plasma coating system as well as a high frequency current source. Located inside the tubular cathode is a magnet arrangement that extends along said tubular cathode for generating a magnetic field. The arrangement enables a low loss infeed of HF current, so that a particularly homogeneous sputter removal from the tubular cathode is guaranteed. The HF current source is coupled to the tubular cathode inside the vacuum chamber by a capacitive infeed of HF current in the form of a coupling capacitor. The coupling capacitor includes a part of the surface of the tubular cathode and a metal plate or metal film that surrounds the tubular cathode, at least partially, at a specified distance.
Public/Granted literature
- US20140332375A1 ASSEMBLY FOR FEEDING IN HF CURRENT FOR TUBULAR CATHODES Public/Granted day:2014-11-13
Information query
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