Invention Grant
US09437435B2 LTPS TFT having dual gate structure and method for forming LTPS TFT 有权
具有双栅极结构的LTPS TFT和用于形成LTPS TFT的方法

LTPS TFT having dual gate structure and method for forming LTPS TFT
Abstract:
The present invention proposes a low temperature poly-silicon thin-film transistor having a dual-gate structure and a method for forming the low temperature poly-silicon thin-film transistor. The low temperature poly-silicon thin-film transistor includes: a substrate, one or more patterned amorphous silicon (a-Si) layers, disposed in a barrier layer on the substrate, for forming a bottom gate, an NMOS disposed on the barrier layer, and a PMOS disposed on the barrier layer. The NMOS comprises a patterned gate electrode (GE) layer as a top gate, and the patterned GE layer and the bottom gate formed by the one or more patterned a-Si layers form a dual-gate structure. The present invention proposes a low temperature poly-silicon thin-film transistor with a more stabilized I-V characteristic, better driving ability, low power consumption, and higher production yield.
Information query
Patent Agency Ranking
0/0