Invention Grant
US09437435B2 LTPS TFT having dual gate structure and method for forming LTPS TFT
有权
具有双栅极结构的LTPS TFT和用于形成LTPS TFT的方法
- Patent Title: LTPS TFT having dual gate structure and method for forming LTPS TFT
- Patent Title (中): 具有双栅极结构的LTPS TFT和用于形成LTPS TFT的方法
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Application No.: US14415607Application Date: 2014-11-14
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Publication No.: US09437435B2Publication Date: 2016-09-06
- Inventor: Xiaoxiao Wang , Hsiang Chih Hsiao , Peng Du , Chang-I Su , Hongyuan Xu , Bo Sun
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD
- Applicant Address: CN Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Guangdong
- Agent Mark M. Friedman
- Priority: CN201410631072 20141111
- International Application: PCT/CN2014/091057 WO 20141114
- International Announcement: WO2016/074204 WO 20160519
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/12 ; H01L29/786 ; H01L29/66 ; H01L29/49 ; H01L29/423

Abstract:
The present invention proposes a low temperature poly-silicon thin-film transistor having a dual-gate structure and a method for forming the low temperature poly-silicon thin-film transistor. The low temperature poly-silicon thin-film transistor includes: a substrate, one or more patterned amorphous silicon (a-Si) layers, disposed in a barrier layer on the substrate, for forming a bottom gate, an NMOS disposed on the barrier layer, and a PMOS disposed on the barrier layer. The NMOS comprises a patterned gate electrode (GE) layer as a top gate, and the patterned GE layer and the bottom gate formed by the one or more patterned a-Si layers form a dual-gate structure. The present invention proposes a low temperature poly-silicon thin-film transistor with a more stabilized I-V characteristic, better driving ability, low power consumption, and higher production yield.
Public/Granted literature
- US20160133473A1 LTPS TFT Having Dual Gate Structure and Method for Forming LTPS TFT Public/Granted day:2016-05-12
Information query
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