Invention Grant
- Patent Title: Replacement metal gate FinFET
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Application No.: US14609803Application Date: 2015-01-30
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Publication No.: US09437436B2Publication Date: 2016-09-06
- Inventor: Hemanth Jagannathan , Sanjay C. Mehta , Junli Wang , Chun-Chen Yeh , Stefan Schmitz
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/28 ; H01L29/78 ; H01L29/66

Abstract:
A field effect transistor device includes a fin including a semiconductor material arranged on an insulator layer, the fin including a channel region, a hardmask layer arranged partially over the channel region of the fin, a gate stack arranged over the hardmask layer and over the channel region of the fin, a metallic alloy layer arranged on a first portion of the hardmask layer, the metallic alloy layer arranged adjacent to the gate stack, and a first spacer arranged adjacent to the gate stack and over the metallic alloy layer.
Public/Granted literature
- US20150137245A1 REPLACEMENT METAL GATE FINFET Public/Granted day:2015-05-21
Information query
IPC分类: